3D FBAR Surface Deformation at Resonance
Film bulk acoustic resonators (FBARs) can often exhibit spurious modes across the pass band which is one of design challenges an RF engineer faces. OnScale gives engineers the ability to quickly prototype a design to understand how effective it is removing these modes.
The 3D FBAR model provides a simple starting structure consisting of a piezoelectric active layer (Aluminum Nitride) with Molybdenum electrodes on a silicon substrate.
The base model allows the following design variables to be adjusted. By default electrode thickness and electrode aspect ratio are set as design variables to be swept (indicated by *).
|Parametric Variable||Description||Default Value|
|aln_thk*||Thickness of AlN piezoelectric layer||800 nm|
|targ_wid*||Width of top electrode||30 um|
|sub_out||Distance from end of cavity to end of AlN||5 µm|
|cav_out||Distance from end of electrode to end of cavity||5 µm|
|cav_thk||Thickness of cavity||1 µm|
|elec_bot||Bottom electrode thickness||400 nm|
|elec_tot||Top electrode thickness||400 nm|
A wide range of outputs can be generated, including:
- Electrical Impedance
- Quality Factor
- Mode Shapes (Harmonic Analysis)
Post Processor Outputs
|Model Size||184093 elements|
|Solve Time||343 secs (16 CPUS)|
|Memory Usage||269 MB|
|Recommended CPU Configuration||16 CPU|
The following input files are required to run this model: