Log in
Log in Simulate Now
Log in Simulate Now

Create MEMS Digital Prototypes with the Mentor-SoftMEMS-OnScale Integrated Workflow

The workflow leverages Tanner EDA solutions from Mentor®, a Siemens business, for schematic and layout capture, SoftMEMS® process simulation to create realistic 3D CAD of as-manufactured MEMS, and the OnScale® Cloud Engineering Simulation platform for fast simulations of large MEMS models and parametric sweeps for MEMS design optimization.

onscale softmems mentor resonator simulation image

Previously, MEMS engineers were forced to work in many separate decoupled EDA, CAD, CAE, and technical computing software tools. Due to the slow pace of these decoupled, legacy desktop engineering processes, MEMS companies had to rely on physical prototyping. With the OnScale and SoftMEMS integration, engineers can rapidly iterate on new designs using digital prototypes.

With a digital prototyping process, engineers first develop parametric geometry in Tanner EDA tool, generate large sets of 3D models for analysis using SoftMEMS, and execute all of the 3D simulations in parallel on the powerful OnScale Cloud Engineering Simulation platform, generating a wealth of engineering data. Reduced-order models of MEMS components are made efficiently, which helps accelerate IC circuit design.

Read the Mentor, SoftMEMS, and OnScale announcement here.

Integration Capabilities

EDA-Process Modeling-Cloud Engineering Simulation integration enabling MEMS Digital Prototyping.


Realistic 3D CAD of as-manufactured micromachined electromechanical systems (MEMS) with SoftMEMS.


On-demand, scalable, pay-as-you-simulate simulation in the cloud with OnScale Integrated workflow including Mentor, SoftMEMS, and OnScale.


Digital Prototypes to accelerate product development and reduce cost and risk.


World-class co-design and simulation capabilities for a tighter integration of engineering teams.

Historically, MEMS specialists – electrical, mechanical, process, reliability, test, and systems engineers – worked in siloed environments and had trouble sharing and collating data in order to derive meaningful engineering insights.


Now, with the Mentor-SoftMEMS-OnScale integration, engineering teams can operate off the same sheet of music and ensure devices are truly optimized for performance, cost, and reliability.

Full 3D simulations of MEMS thin-film bulk acoustic resonators (FBARs).

Full 3D simulation of a MEMS accelerometer.

Start Your Integrated
Mentor – SoftMEMS – OnScale Workflow